光学薄膜样品的温度场和形变场分析

通过积分变换理论上求解了光学薄膜样品在脉冲或方波调制激励光作用下的热传导方程和热弹方程，从而获得了样品在瞬态和稳态情况下对应的温度场和形变场.为验证所求解，将理论解析解的计算机模拟结果与有限元的分析结果在时域和空间域进行了比较，两结果获得了较好的一致性；同时讨论了温度，热变形随激励光的调制频率、光斑半径等参数的变化.讨论了此模型在测量光学薄膜样品吸收损耗和表面热变形中的应用.关键词：温度场形变场表面热透镜有限元

Analysis of temperature and deformation fields in an optical coating sample

By solving thermal conduction and thermo-elastic equations with an integral-transform method, a theory to describe the three-dimensional temperature and deformation distributions in an optical coating sample irradiated by a pulsed or square-wave modulated laser is developed for both transient and steady state cases. The theoretical simulations are compared with corresponding results of the finite-element method in time and space domains and good agreements are obtained. In addition, the influences of heating-beam radius and modulation frequency on the temperature and deformation distributions are discussed. Applications of the theoretical model to absorptance and deformation measurements of optical coatings are discussed.