| 大气压辉光放电研究现状及应用前景 |
| |
| 引用本文： | 张锐,刘鹏,詹如娟.大气压辉光放电研究现状及应用前景[J].物理,2004,33(6):430-434. |
| |
| 作者姓名： | 张锐 刘鹏 詹如娟 |
| |
| 作者单位： | 中国科学技术大学近代物理系,合肥,230026 |
| |
| 摘 要： | 大气压辉光放电由于均匀性好、能量效率高并且不需要真空系统，正日益受到人们重视和研究．文章综述了大气压辉光放电的研究进展，包括实验条件、放电特征、放电机理以及最新的诊断方法，还介绍它在薄膜沉积、材料表面改性、污染物质的消毒去污等方面的应用前景．
|
| 关 键 词： | 大气压辉光放电 均匀性 低温等离子体 能量效率 放电特征 薄膜沉积 材料表面改性 |
Status and application prospects of atmospheric pressure glow discharge studies |
| |
| Abstract: | Recently there has been increasing interest in atmospheric pressure glow discharge systems because they have good uniformity, high energy efficiency and do not need high vacuum system. We summarize recent developments of studies on atmospheric pressure glow discharges, including experimental conditions, discharge characteristics, discharge mechanism and new diagnostic methods. There are great prospects for a number of industrial applications, such as thin film deposition, surface modification, disinfection etc. |
| |
| Keywords: | atmospheric pressure glow discharge uniformity low temperature plasma |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
