双探头三维表面轮廓测量系统

提出了一种将原子力显微(AFM)探头与位置敏感探测器测距探头相结合的双探头三维表面轮廓测量新方法, 可在获取样品表面轮廓的同时, 测定样品局部形貌。搭建了双探头三维表面轮廓测量系统, 阐述了系统的工作原理, 并对其结构组成包括双探头、步进扫描台和计算机控制平台进行了说明。用2000 line/mm的光栅进行了扫描实验, 对系统的测量范围进行了标定。以外径8 mm、内径4 mm的金属垫圈为样品, 进行了整体三维表面轮廓与局部表面形貌测量实验, 给出了垫圈表面图和局部三维形貌图。结果表明, 该系统能满足不同尺寸和材质的样品的测量要求, 即可实现对样品轮廓的大范围扫描测量, 又可对样品局部进行高精度形貌测量。

A Dual-probe Three-Dimensional Profile Measurement System

A new three-dimensional (3D) profile measuring method which combines the atomic force microscopic (AFM) probe with the position sensitive detector (PSD) range probe is proposed. This method can obtain both the large size 3D profile and micro morphological character of a point on the sample. A dual-probe 3D profile measuring system is developed. The working principle is elaborated and the three parts of the system, the dual-probe, the step-controlled scanning stage and the computer controlling center are illuminated. The measuring range of the system is demarcated by measuring a known grating of 2000 line/mm. The 3D surface profile images in local morphology and entire profile of an annular gasket with inside and external diameter of 4 mm and 8 mm are given respectively. The experimental results show that this system is expected to be utilized both in large range measurement and local three-dimensional reconstruction with high-precision for samples which are of different sizes and materials.