| 真空蒸发镀膜膜厚的测量 |
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| 引用本文： | 高雁. 真空蒸发镀膜膜厚的测量[J]. 大学物理实验, 2008, 21(4): 17-19 |
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| 作者姓名： | 高雁 |
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| 作者单位： | 忻州师范学院,忻州,034000 |
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| 摘 要： | 测量镀膜厚度的方法有很多，在实验室现有的条件下，探究光学干涉方法测出镀膜厚度，其中光学干涉方法包括两种：一是根据多光束干涉的原理，利用读数显微镜测量镀膜的厚度；二是根据自光干涉的原理，利用迈克尔逊干涉仪测量镀膜的厚度。
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| 关 键 词： | 真空蒸发镀膜 薄膜厚度 迈克尔逊干涉仪 |
MEASURING THE THICKNESS OF VACUUM EVAPORATING COATING FILMS |
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| Gao Yan. MEASURING THE THICKNESS OF VACUUM EVAPORATING COATING FILMS[J]. Physical Experiment of College, 2008, 21(4): 17-19 |
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| Authors: | Gao Yan |
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| Affiliation: | Gao Yan(Xinzhou Teachers University,Xinzhou,034000) |
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| Abstract: | There are many methods of measuring the thickness of film,under the laboratory existing condition,we research the optical interference method,in which include two kinds:according the principle of multiple beam interference,using interference microscope to measure the thickness of films and using Michelson interferometer to measure the thickness of films. |
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| Keywords: | vacuum evaporating coating films thickness of film Michelson interferometer |
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