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Opening the Pandora's jar of molecule‐to‐material conversion in chemical vapor deposition: Insights from theory
Authors:Gloria Tabacchi  Ettore Fois  Davide Barreca  Alberto Gasparotto
Affiliation:1. Department of Science and High Technology, University of Insubria and INSTM, , 22100 Como, Italy;2. CNR‐ISTM and INSTM, Department of Chemistry, Padova University, , 35131 Padova, Italy;3. Department of Chemistry, Padova University and INSTM, , 35131 Padova, Italy
Abstract:First‐principles modeling can be a powerful tool for the understanding and optimization of bottom‐up processes for nanomaterials fabrication, such as chemical vapor deposition (CVD), a key technology for the development of advanced systems and devices. Molecule‐to‐material conversion by CVD involves complex chemical phenomena, which are often obscure and still largely unexplored. A proper modeling would require high level of accuracy, large sized models and should include both temperature effects and statistical sampling of reactive events. By presenting a few selected examples, this perspective surveys such problems and discusses currently available approaches for their solution. Possible strategies for future advances in the field are also highlighted. © 2013 Wiley Periodicals, Inc.
Keywords:high‐temperature chemistry  surface chemistry  density functional calculations  molecular dynamics  wavefunction methods  chemical vapor deposition  transition metals  reactivity
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