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Study of the metastable region in the growth of GaN using the Na flux method
Authors:Fumio Kawamura  Masanori Morishita  Naoya Miyoshi  Mamoru Imade  Masashi Yoshimura  Yasuo Kitaoka  Yusuke Mori  Takatomo Sasaki
Institution:aGraduate School of Electrical Engineering, Osaka University, Suita, Yamadaoka 2-1, 565-0871, Japan
Abstract:It was revealed that the metastable region, in which liquid phase epitaxy (LPE) of GaN single crystals proceeds without the generation of polycrystals, expands with growth temperature in the Na flux method. The metastable region appears when LPE growth proceeds at temperatures above 1073 K, although generation of polycrystals inevitably occurs on a crucible at temperatures less than 1073 K. The highest growth rate of 14 μm/h in a small experimental setup was achieved at a temperature of 1163 K with a nitrogen pressure of 5.5 MPa due to complete suppression of the growth of polycrystals on a crucible, even though the supersaturation at this condition reached a fairly high level.Also, an LPE crystal with a flat surface could easily be obtained under high-temperature conditions.
Keywords:A1  Nucleation  A1  Crystal morphology  A3  Liquid phase epitaxy  B1  Nitride  B1  Single crystal
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