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Synthesis of ordered Ge-Si heterostructures containing ultrasmall germanium nanoclusters |
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| Authors: | Yu B Bolkhovityanov S Ts Krivoshchapov A I Nikiforov B Z Ol’shanetskii O P Pchelyakov L V Sokolov S A Teys |
| Institution: | (1) Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent’eva 13, Novosibirsk, 630090, Russia |
| Abstract: | Different techniques for the fabrication of structures containing ensembles of ultrasmall germanium nanoclusters distributed with a high density over the substrate surface are discussed. How to control the morphology and ordering of these ensembles is also discussed. |
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