Role of MW-ECR hydrogen plasma on dopant deactivation and open-circuit voltage in crystalline silicon solar cells

Plasma hydrogenation is an efficient method to passivate intergrain and intragrain defects of polycrystalline silicon (pc-Si) solar cells. The hydrogenation experiments were carried out in hydrogen plasma generated in an electron cyclotron resonance system controlling different operating parameters such as microwave power (P _MW), process time (t _H) and hydrogenation temperature (T _H) for a fixed hydrogen flux of 30 sccm. The hydrogenation of n⁺pp⁺ pc-Si solar cells resulted in an improvement in the open-circuit voltage. The improvement was correlated with the dopant deactivation due to the formation of boron–hydrogen bonding. This was demonstrated from the changes in the doping level after hydrogenation of n⁺p diode structures made using single crystalline silicon as a reference material. It was found that deactivation of boron was more pronounced at high microwave plasma power, in good agreement with the high open-circuit voltage values obtained on pc-Si mesa cells. On the other hand, the effect of longer hydrogenation time and higher temperature resulted in a decrease of boron deactivation, while an increase in V _oc with a tendency of saturation at high T _H was observed. Reasons for such behavior were thoroughly explained.