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Study of (Ga,Mn)N prepared by Mn-ion implantation using optical techniques
引用本文:徐大庆,张义门,张玉明,李培咸,王超,吕红亮,汤晓燕,王悦湖. Study of (Ga,Mn)N prepared by Mn-ion implantation using optical techniques[J]. 中国物理 B, 2008, 17(12): 4648-4651
作者姓名:徐大庆  张义门  张玉明  李培咸  王超  吕红亮  汤晓燕  王悦湖
作者单位:Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China
基金项目:Project supported by the NationalNatural Science Foundation of China (Grant No 90407014).
摘    要:
This paper reports that (Ga, Mn)N is prepared using implantation of 3at.% Mn Ions into undoped GaN. Structural characterization of the crystals was performed using x-ray diffraetion(XRD). Detailed XRD measurements have revealed the characteristic of Mn-ion implanted GaN with a small contribution of other compounds. With Raman spectroscopy measurements, the spectra corresponding to the intrinsic GaN layers demonstrate three Raman active excitations at 747, 733 and 566 cm-1 identified as EI(LO), A1 (LO) and E~, respectively. The Mn-doped GaN layers exhibit additional excitations at 182, 288, 650 725, 363, 506cm^-1 and the vicinity of E~ mode. The modes observed at 182, 288, 650 725em 1 are assigned to macroscopic disorder or vacancy-related defects caused by Mn-ion implantation. Other new phonon modes are assigned to Mnx-Ny, Gax-Mny modes and the local vibrational mode of Mn atoms in the (Ga, Mn)N, which are in fair agreement with the standard theoretical results.

关 键 词:高能离子注入  GaN  理论物理  铁磁性半导体
收稿时间:2008-05-16
修稿时间:2008-06-05

Study of (Ga, Mn)N prepared by Mn-Ion implantation using optical techniques
Xu Da-Qing,Zhang Yi-Men,Zhang Yu-Ming,Li Pei-Xian,Wang Chao,L"u Hong-Liang,Tang Xiao-Yan and Wang Yue-Hu. Study of (Ga, Mn)N prepared by Mn-Ion implantation using optical techniques[J]. Chinese Physics B, 2008, 17(12): 4648-4651
Authors:Xu Da-Qing,Zhang Yi-Men,Zhang Yu-Ming,Li Pei-Xian,Wang Chao,L"  u Hong-Liang,Tang Xiao-Yan  Wang Yue-Hu
Affiliation:Key Laboratory of Ministry of Education for Wide Band-GapSemiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China
Abstract:
This paper reports that (Ga, Mn)N is prepared using implantation of3at.% Mn Ions into undoped GaN. Structural characterization ofthe crystals was performed using x-ray diffraction(XRD). DetailedXRD measurements have revealed the characteristic of Mn-Ionimplanted GaN with a small contribution of other compounds. WithRaman spectroscopy measurements, the spectra corresponding to theintrinsic GaN layers demonstrate three Raman active excitations at747, 733 and 566,cm-1 identified as E-1(LO),$A1(LO) and E2H, respectively. The Mn-doped GaN layersexhibit additional excitations at 182, 288, 650--725, 363,506cm-1 and the vicinity of $E2H mode. The modesobserved at 182, 288, 650--725,cm-1 are assigned tomacroscopic disorder or vacancy-related defects caused by Mn-ionimplantation. Other new phonon modes are assigned toMnx-Ny, Gax-Mny modes and the local vibrationalmode of Mn atoms in the (Ga, Mn)N, which are in fair agreement withthe standard theoretical results.
Keywords:Mn-Ion implantation GaN   diluted magnetic semiconductors   Raman spectroscopy   x-ray diffraction
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