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Study of (Ga,Mn)N prepared by Mn-ion implantation using optical techniques
引用本文:徐大庆,张义门,张玉明,李培咸,王超,吕红亮,汤晓燕,王悦湖.Study of (Ga,Mn)N prepared by Mn-ion implantation using optical techniques[J].中国物理 B,2008,17(12):4648-4651.
作者姓名:徐大庆  张义门  张玉明  李培咸  王超  吕红亮  汤晓燕  王悦湖
作者单位:Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant No 90407014).
摘    要:This paper reports that (Ga, Mn)N is prepared using implantation of 3at.% Mn Ions into undoped GaN. Structural characterization of the crystals was performed using x-ray diffraetion(XRD). Detailed XRD measurements have revealed the characteristic of Mn-ion implanted GaN with a small contribution of other compounds. With Raman spectroscopy measurements, the spectra corresponding to the intrinsic GaN layers demonstrate three Raman active excitations at 747, 733 and 566 cm-1 identified as EI(LO), A1 (LO) and E~, respectively. The Mn-doped GaN layers exhibit additional excitations at 182, 288, 650 725, 363, 506cm^-1 and the vicinity of E~ mode. The modes observed at 182, 288, 650 725em 1 are assigned to macroscopic disorder or vacancy-related defects caused by Mn-ion implantation. Other new phonon modes are assigned to Mnx-Ny, Gax-Mny modes and the local vibrational mode of Mn atoms in the (Ga, Mn)N, which are in fair agreement with the standard theoretical results.

关 键 词:高能离子注入  GaN  理论物理  铁磁性半导体
收稿时间:2008-05-16
修稿时间:6/5/2008 12:00:00 AM

Study of (Ga, Mn)N prepared by Mn-Ion implantation using optical techniques
Xu Da-Qing,Zhang Yi-Men,Zhang Yu-Ming,Li Pei-Xian,Wang Chao,L\"u Hong-Liang,Tang Xiao-Yan and Wang Yue-Hu.Study of (Ga, Mn)N prepared by Mn-Ion implantation using optical techniques[J].Chinese Physics B,2008,17(12):4648-4651.
Authors:Xu Da-Qing  Zhang Yi-Men  Zhang Yu-Ming  Li Pei-Xian  Wang Chao  L\"u Hong-Liang  Tang Xiao-Yan and Wang Yue-Hu
Institution:Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an 710071, China
Abstract:This paper reports that (Ga, Mn)N is prepared using implantation of 3at.% Mn Ions into undoped GaN. Structural characterization of the crystals was performed using x-ray diffraction(XRD). Detailed XRD measurements have revealed the characteristic of Mn-Ion implanted GaN with a small contribution of other compounds. With Raman spectroscopy measurements, the spectra corresponding to the intrinsic GaN layers demonstrate three Raman active excitations at 747, 733 and 566\,cm-1 identified as E-1(LO), $A1(LO) and E2H, respectively. The Mn-doped GaN layers exhibit additional excitations at 182, 288, 650--725, 363, 506cm-1 and the vicinity of $E2H mode. The modes observed at 182, 288, 650--725\,cm-1 are assigned to macroscopic disorder or vacancy-related defects caused by Mn-ion implantation. Other new phonon modes are assigned to Mnx-Ny, Gax-Mny modes and the local vibrational mode of Mn atoms in the (Ga, Mn)N, which are in fair agreement with the standard theoretical results.
Keywords:Mn-Ion implantation GaN  diluted magnetic semiconductors  Raman spectroscopy  x-ray diffraction
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