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| 不同波长激光对绝缘体上硅材料损伤阈值的理论研究与数值分析 | |
| 引用本文： | 刘晨星,张大勇,付博,李阳龙,任攀.不同波长激光对绝缘体上硅材料损伤阈值的理论研究与数值分析[J].应用激光,2012,32(2):134-139. |
| 作者姓名： | 刘晨星 张大勇 付博 李阳龙 任攀 |
| 作者单位： | 刘晨星:中国工程物理研究院流体物理研究所, 四川 绵阳 621900 张大勇:中国工程物理研究院流体物理研究所, 四川 绵阳 621900 付博:中国工程物理研究院流体物理研究所, 四川 绵阳 621900 李阳龙:中国工程物理研究院流体物理研究所, 四川 绵阳 621900 任攀:中国工程物理研究院流体物理研究所, 四川 绵阳 621900 |
| 摘 要： | 分析了不同波长激光辐照绝缘体上硅(SOI)材料时的相互作用机制。使用ANSYS软件热分析模块,通过有限元方法模拟得到波长分别是355、532、1064nm的激光辐照SOI材料后的温度场分布。讨论了不同波长激光辐照SOI材料表面时的自加热现象。 |
| 关 键 词： | SOI材料 波长效应 激光损伤 |
Theoretical Research and Numerical Analysis on Laser with Different Wavelengths Induced Damage Threshold of Silicon-on-Insulator Material |
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| Liu Chenxing,Zhang Dayong,Fu Bo,Li Yanglong,Ren Pan.Theoretical Research and Numerical Analysis on Laser with Different Wavelengths Induced Damage Threshold of Silicon-on-Insulator Material[J].Applied Laser,2012,32(2):134-139. | |
| Authors: | Liu Chenxing Zhang Dayong Fu Bo Li Yanglong Ren Pan |
| Institution: | (Institute of Fluid Physics,China Academy of Engineering Physics,Mianyang,Sichuan 621900,China) |
| Abstract: | The mechanism of interaction between laser with different wavelengthes and Silicon-on-Insulator(SOI) material is studied. The temperature distributions in the SOI material after laser pulse duration are simulated by a finite element analysis method with the ANSYS heat analysis module, and the laser wavelengths are 355 nm, 1064 nm, 532 nm respectively. The self-heating phenomenon in SOI when irradiatied by laser with different wavelengthes is discussed. |
| Keywords: | silicon-on-insulator material wavelength effect laser damage |
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