Determination of stoichiometry and concentration of trace elements in thin BaxSr1-xTiO3 perovskite layers |
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| Authors: | Becker J S Boulyga S F |
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| Affiliation: | Central Department of Analytical Chemistry (ZCH), Research Centre Jülich, Germany. s.becker@fz-juelich.de |
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| Abstract: | This paper describes an analytical procedure for determining the stoichiometry of BaxSr1-xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The performance and the limits of solid-state mass spectrometry analytical methods for the surface analysis of thin BaxSr1-xTiO3 perovskite layers sputtered neutral mass spectrometry (SNMS)--are investigated and discussed. |
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