| 高精度中小11径非球面修抛技术研究 |
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| 引用本文： | 刘军汉,熊长新,闫德全,周杨. 高精度中小11径非球面修抛技术研究[J]. 光学与光电技术, 2010, 8(1): 80-83 |
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| 作者姓名： | 刘军汉 熊长新 闫德全 周杨 |
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| 作者单位： | 华中光电技术研究所-武汉光电国家实验室,湖北,武汉,430073 |
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| 摘 要： | 为实现高精度中小口径非球面的加工，介绍了一种非球面修抛技术。基于Preston假设，将抛光过程描述成一个线性方程，计算得到材料的去除量与抛光时间、抛光压力和零件转速之间的函数关系。设计了整体修抛法和环带修抛法两种方法，在数控抛光的基础上，对口径为Ф117mm的凹抛物面和口径为Ф17mm凸双曲面进行修抛，修抛后非球面的面形精度PV值为0．184μm，RMS均小于0．032μm，达到了工程化应用要求，实现了中小口径非球面的高精度加工。
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| 关 键 词： | 高精度 非球面 修抛 面形精度 |
Study on High Precision Correction Polishing Technology for Middle or Small Aspheric Suface |
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| LIU Jun-han,XIONG Chang-xin,YAN De-quan,ZHOU Yang. Study on High Precision Correction Polishing Technology for Middle or Small Aspheric Suface[J]. optics&optoelectronic technology, 2010, 8(1): 80-83 |
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| Authors: | LIU Jun-han XIONG Chang-xin YAN De-quan ZHOU Yang |
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| Affiliation: | ( Huazhong Institute of Electro-Optics--Wuhan National Laboratory for Optoelectronies, Wuhan 430073, China ) |
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| Abstract: | A high precision correction polishing technology for middle or small aspheric is introduced in this paper. The polishing process is described as a linear equation by Preston hypothesis. The function relationship about material removal rate, polishing time, polishing pressure and the lens rotational speed is obtained by calculation. Two correction polishing methods that include the whole polishing and annulus polishing are designed. Based on NC polishing,Ф117 mm concave paraboloid mirror and Ф17 mm convex hyperboloid mirror are polished. The results show that the final surface figure of the aspheric surface is 0. 184 μm（PV）, and the RMS is less than 0. 032μm. It meets the requirement of engineering application and realizes the fabrication of middle and small size high precision aspheric surface. |
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| Keywords: | high precision aspheric surface correction polishing surface figure |
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