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The parameters of hydrogen chloride and hydrogen bromide direct-current glow-discharge plasmas |
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| Authors: | A. M. Efremov A. A. Smirnov V. I. Svettsov |
| Affiliation: | (1) Department of Electronic Devices and Materials Technology, State University of Chemistry and Technology, 7 F. Engels St., 153000 Ivanovo, Russia;(2) Department of Control and Instrumentation Engineering, Korea University, Jochiwon, Chungnam, 339-700, Korea;(3) Division of Electronic, Computer, and Communication Engineering, Hanseo University, Chungnam, 356-706, Korea; |
| Abstract: | A comparative analysis of the parameters of HCl and HBr plasmas was performed by means of mathematical simulation, solving the Boltzmann kinetic equation in the one-component approximation. The specifics of the kinetics of the electron impact-induced processes and the composition of plasma charged species were analyzed. |
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