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A two-dimensional self-aligning system driven by shape memory alloy actuators |
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| Authors: | Yigui Li Minoru Sasaki Kazihiro Hane |
| Institution: | a Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Shanghai Jiaotong University, Shanghai 200030, PR China;b Research Organization of Science and Engineering, Ritsmeikan University, 1-1-1, Noji-higashi, Kusatsu, Shiga 525-8577, Japan;c Department of Mechanical-Electronic, Tohoku University, Sendai 980-7985, Japan |
| Abstract: | The two-dimensional automatic alignment system with an optical aperture is developed. The optical aperture with four integrated photodiode cells for feedback control signal is fabricated by MEMS techniques. The translation stage of the system is driven by four shape-memory-alloy positioning actuators to realize two-dimensional (XY-plane) movement. |
| Keywords: | Automatic alignment Optical aperture SMA positioning actuator |
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