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CO2 laser ablative etching of polyethylene terephthalate
Authors:P E Dyer  G A Oldershaw  J Sidhu
Institution:(1) Department of Applied Physics, University of Hull, HU6 7RX Hull, UK
Abstract:Films of polyethylene terephthalate (PET) can be successfully etched with 9 mgrm radiation from a pulsed TEA CO2 laser. The relationship between etch depth and fluence is broadly similar to that observed for excimer laser etching but with a less well-defined threshold. Time-resolved photoacoustic measurements of stress waves generated in the interaction show that at a fluence of 1.8 J cm–2 ablation occurs 100–200 ns after the start of the laser pulse, a time which is consistent with the rate of thermal decomposition of PET. The volatile products of ablation are carbon monoxide, carbon dioxide, methane, ethyne, ethene, benzene, ethanal, and small quantities of other products. For fluences close to and appreciably above the threshold the ablated material consists predominantly of involatile species of relatively high molecular weight, whereas at higher fluences substantial fragmentation of the polymer to small molecules occurs.School of Chemistry
Keywords:82  50  42  60
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