Single-source precursors to gallium and indium oxide thin films |
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| Authors: | Leanne G Bloor Claire J Carmalt David Pugh |
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| Institution: | Department of Chemistry, University College London, Christopher Ingold Laboratories, 20 Gordon St, London WC1H 0AJ, UK |
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| Abstract: | Gallium and indium oxide thin films have received much attention in recent years for their wide range of applications. This review summarises the literature concerning single-source precursors and the methods employed to deposit gallium and indium oxide thin films using these compounds. An update of the literature outlining compounds which are potential single-source precursors to these materials is also included. |
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