| 长程轮廓仪用于筒状超光滑表面测量的误差分析及校正 |
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| 引用本文： | 李顺,巩岩. 长程轮廓仪用于筒状超光滑表面测量的误差分析及校正[J]. 光学学报, 2011, 0(11): 117-123 |
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| 作者姓名： | 李顺 巩岩 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院研究生院; |
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| 基金项目： | 国家自然科学基金(40974110,40674098)资助课题 |
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| 摘 要： | 为了提高使用长程轮廓仪对筒状超光滑非球面进行面型测量的精度,研究并总结了测量过程中常见的误差源及校正方法.针对测量过程中对结果影响较大的转台转轴与待测筒状镜光轴之间的倾斜和偏心误差做了详细的分析,提出利用数据处理校正这部分误差的方法.编写了相应的数据处理程序,通过数值模拟实验对该程序进行了验证.实验结果表明,该程序能够...
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| 关 键 词： | 光学测量 误差分析 数据处理 长程轮廓仪 掠入射望远镜 X射线光学 |
Error Analysis and Correction during Measurement of Tube-Shaped Super-Smooth Mirrors Using Long Trace Profiler |
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| Li Shun, Gong Yan State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics , Physics,Chinese Academy of Sciences,Changchun,Jilin,China Graduate University of Chinese Academy of Sciences,Beijing ,China. Error Analysis and Correction during Measurement of Tube-Shaped Super-Smooth Mirrors Using Long Trace Profiler[J]. Acta Optica Sinica, 2011, 0(11): 117-123 |
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| Authors: | Li Shun Gong Yan State Key Laboratory of Applied Optics Changchun Institute of Optics Fine Mechanics Physics Chinese Academy of Sciences Changchun Jilin China Graduate University of Chinese Academy of Sciences Beijing China |
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| Affiliation: | Li Shun1,2 Gong Yan1 1 State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin130033,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | To improve the accuracy of long trace profiler for measuring the surface profile of tube-shaped super-smooth mirrors,some common errors and correcting methods are studied and summed up.The errors caused by the tilt and decenter between the rotating axis of rotary table and the axis of tube-shaped mirror under test during measurement will influence the result very much.These errors are in detail analyzed,and a correction method through data processing is presented.Then,a data processing code is programmed,an... |
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| Keywords: | optical measurement error analysis data processing long trace profiler grazing incidence telescope X-ray optics |
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