| 激光会聚铬原子光栅三维特性分析 |
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| 引用本文： | 张萍萍,马艳,张宝武,李同保.激光会聚铬原子光栅三维特性分析[J].光学学报,2011(11):190-194. |
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| 作者姓名： | 张萍萍 马艳 张宝武 李同保 |
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| 作者单位： | 同济大学物理系;中国计量学院计量测试工程学院;清华大学精密测试技术及仪器国家重点实验室; |
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| 基金项目： | 国家自然科学基金(10804084); 清华大学国家重点实验室开放基金(DL_003)资助课题 |
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| 摘 要： | 采用近共振激光驻波场会聚铬原子沉积技术制作的原子光栅可以作为纳米级长度计量标准.基于粒子光学模型,综合考虑横向发散角、纵向速度分布以及同位素等影响因素,采用蒙特-卡罗方法确定原子运动的初始条件,对激光驻波会聚原子的三维特性进行了研究.获得了不同激光功率下沉积条纹的三维结构,分析了纵向高斯激光分布和椭圆高斯激光截面对沉积...
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| 关 键 词： | 激光光学 原子光刻 纳米计量 激光驻波场 蒙特-卡罗方法 |
Properties of 3D Nanostructures Fabricated by Laser-Focused Cr Atomic Deposition |
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| Zhang Pingping Ma Yan Zhang Baowu, Li Tongbao.Properties of 3D Nanostructures Fabricated by Laser-Focused Cr Atomic Deposition[J].Acta Optica Sinica,2011(11):190-194. |
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| Authors: | Zhang Pingping Ma Yan Zhang Baowu Li Tongbao |
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| Institution: | Zhang Pingping1 Ma Yan1 Zhang Baowu2,3 Li Tongbao1 1 Department of Physics,Tongji University,Shanghai 200092,China 2 College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China 3 State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China |
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| Abstract: | Periodic nanostructures fabricated by atom lithography using standing-wave light field can be applied for nanometrology.Atom-optical properties of 3D standing-wave light field are studied with particle optics model.The initial condition of each trajectory is stochastically selected with Monte-Carlo method,where the effects of isotope,longitudinal velocity distribution and transverse Gaussian divergence are systematically evaluated.3D nanostructures with varying laser powers are presented,which shows the eff... |
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| Keywords: | laser optics atom lithography nanometrology standing wave light field Monte-Carlo method |
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