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多层膜劳厄透镜对8keV X射线的聚焦性能模拟研究
引用本文:李浩川,黄秋实,朱京涛,王占山. 多层膜劳厄透镜对8keV X射线的聚焦性能模拟研究[J]. 光学学报, 2011, 0(8): 300-304
作者姓名:李浩川  黄秋实  朱京涛  王占山
作者单位:同济大学物理系精密光学工程技术研究所先进微结构材料教育部重点实验室;
基金项目:国家自然科学基金(10825521); 上海市科委资助项目(09XD1404000); 科技部国际合作项目(2008DFA01920)资助课题
摘    要:基于多层膜技术的劳厄(Laue)透镜能实现硬X射线纳米级聚焦,在X射线微纳分析领域具有重要的应用前景.基于衍射动力学理论,分析了X射线在多层膜劳厄透镜中的传播,计算了不同结构的多层膜劳厄透镜对8 keVX射线的聚焦性能.结果表明,最外层厚度为5 nm的倾斜多层膜劳厄透镜可获得5.7 nm的聚焦光斑和26%的平均衍射效率...

关 键 词:X射线光学  多层膜劳厄透镜  衍射动力学  波带片  分辨率

Simulation on Focusing Performance of X-Ray Multilayer Laue Lens for 8 keV X-Ray
Li Haochuan Huang Qiushi Zhu Jingtao Wang Zhanshan. Simulation on Focusing Performance of X-Ray Multilayer Laue Lens for 8 keV X-Ray[J]. Acta Optica Sinica, 2011, 0(8): 300-304
Authors:Li Haochuan Huang Qiushi Zhu Jingtao Wang Zhanshan
Affiliation:Li Haochuan Huang Qiushi Zhu Jingtao Wang Zhanshan(Key Laboratory of Advanced Microstructure Materials,Ministry of Education,Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092,China)
Abstract:A nanometer-scale focused spot of hard X-ray can be achieved by multilayer Laue lenses(MLLs).X-ray propagation in MLL is analyzed using dynamical diffraction theory.The focusing performance of tilted MLL is calculated for 8 keV X-ray.The results show that a focused beam size of 5.7 nm and a mean efficiency of 26% can be obtained by a tilted MLL with an outmost zone thickness of 5 nm.MLL is proved theoretically to be an effective method to focus X-ray beam.
Keywords:X-ray optics  multilayer Laue lens  dynamical diffraction theory  zone plate  resolution  
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