| 光学薄膜及其进展 |
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| 引用本文： | 范正修. 光学薄膜及其进展[J]. 光学学报, 2011, 0(9): 268-272 |
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| 作者姓名： | 范正修 |
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| 作者单位： | 中国科学院上海光学精密机械研究所中国科学院强激光材料重点实验室; |
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| 摘 要： | 对光学薄膜的性能及制备技术等方面进行了简要的评述,并指出随着科学技术的进步,光学薄膜及相关技术不论从广度还是深度来看都得到了显著发展.
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| 关 键 词： | 薄膜 薄膜技术 制备 检测 监控 |
Development and Recent Progress of Optical Thin Films |
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| Fan Zhengxiu. Development and Recent Progress of Optical Thin Films[J]. Acta Optica Sinica, 2011, 0(9): 268-272 |
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| Authors: | Fan Zhengxiu |
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| Affiliation: | Fan Zhengxiu(Key Laboratory of Materials for High Power Lasers,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China) |
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| Abstract: | Development of deposition technology and properties of optical thin films is reviewed.It shows that rapid advances in properties and application fields are achieved for optical thin films with the progress of science and technology. |
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| Keywords: | thin films thin film technology preparation measurement monitor |
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