| 微小孔偏差对远场波前质量影响分析 |
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| 引用本文： | 卢增雄,金春水,马冬梅,张海涛. 微小孔偏差对远场波前质量影响分析[J]. 光学学报, 2011, 0(8): 110-116 |
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| 作者姓名： | 卢增雄 金春水 马冬梅 张海涛 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院研究生院; |
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| 基金项目： | 国家科技重大专项资助课题 |
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| 摘 要： | 点衍射干涉仪(PDI)中小孔质量影响参考球面波的质量,加工和装调误差使实际小孔与理想圆孔之间产生了偏差.利用瑞利-索末菲衍射公式,对因小孔加工和装调误差产生的边缘粗糙小孔和椭圆小孔的远场衍射波前质量作了详细的分析.小孔边缘的粗糙度主要在衍射波前中引入了三叶形像差,小孔的椭圆度在衍射波前中引入了小量的像散.对于直径在0....
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| 关 键 词： | 光学检测 点衍射干涉仪 瑞利-索末菲衍射 小孔边缘粗糙度 椭圆小孔 波前质量 |
Analysis of Effect of Tiny Pinhole Deviation on Far-Field Wave-Front Quality |
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| Lu Zengxiong, Jin Chunshui Ma Dongmei Zhang Haitao State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics , Physics,Chinese Academy of Sciences,Changchun,Jilin,China Graduate University of Chinese Academy of Sciences,Beijing ,China. Analysis of Effect of Tiny Pinhole Deviation on Far-Field Wave-Front Quality[J]. Acta Optica Sinica, 2011, 0(8): 110-116 |
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| Authors: | Lu Zengxiong Jin Chunshui Ma Dongmei Zhang Haitao State Key Laboratory of Applied Optics Changchun Institute of Optics Fine Mechanics Physics Chinese Academy of Sciences Changchun Jilin China Graduate University of Chinese Academy of Sciences Beijing China |
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| Affiliation: | Lu Zengxiong1,2 Jin Chunshui1 Ma Dongmei1 Zhang Haitao1 1 State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin130033,China2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | The quality of the reference wave front in point-diffraction interferometer(PDI) is constrained by the quality of the pinhole,and the deviation between an actual pinhole and a perfect one is caused by machining errors and the misalignment.The quality of the far-field wave front diffracted by a rough-edge circular pinhole and an elliptical pinhole is analyzed in detail based on Rayleigh-Sommerfeld diffraction formula.Pinhole edge roughness mainly causes the trefoil aberration in diffracted wave front,and the... |
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| Keywords: | optical testing point diffraction interferometer Rayleigh-Sommerfeld diffraction pinhole edge roughness elliptical pinhole wave-front quality |
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