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基于远程LIBS技术的镍基高温合金成分分析方法的研究
引用本文:王亚文,张勇,陈雄飞,刘英,赵珍阳,叶明国,许玉兴,刘鹏宇. 基于远程LIBS技术的镍基高温合金成分分析方法的研究[J]. 光谱学与光谱分析, 2022, 42(2): 603-608. DOI: 10.3964/j.issn.1000-0593(2022)02-0603-06
作者姓名:王亚文  张勇  陈雄飞  刘英  赵珍阳  叶明国  许玉兴  刘鹏宇
作者单位:有研科技集团有限公司国家有色金属及电子材料分析测试中心 ,北京 100088;国合通用测试评价认证股份公司 ,北京 101400;北京有色金属研究总院 ,北京 100088;山东东仪光电仪器有限公司 ,山东 烟台 264670;中国科学院山东综合技术转化中心烟台中心 ,山东 烟台 264003;中国科学院长春光学精密机械与物理研究所 ,吉林 长春 130033
基金项目:国家新材料测试评价平台建设项目(TC170A5SU)资助。
摘    要:基于自行设计搭建的远程激光诱导击穿光谱(LIBS)系统,完成了远程LIBS的聚焦特性分析,并对远程LIBS技术应用于镍基高温合金成分分析的实验方法进行了研究.该LIBS系统具备激光发射光路和信号采集光路同轴且独立变焦的特点,通过自动聚焦,可实现1~10 m的远程分析.研究表明:受激光聚焦焦深的影响,等离子体光信号可探测...

关 键 词:激光诱导击穿光谱  远程  焦深  标准曲线法
收稿时间:2021-01-06

Quantitative Analysis of Nickel-Based Superalloys Based on a Remote LIBS System
WANG Ya-wen,ZHANG Yong,CHEN Xiong-fei,LIU Ying,ZHAO Zhen-yang,YE Ming-guo,XU Yu-xing,LIU Peng-yu. Quantitative Analysis of Nickel-Based Superalloys Based on a Remote LIBS System[J]. Spectroscopy and Spectral Analysis, 2022, 42(2): 603-608. DOI: 10.3964/j.issn.1000-0593(2022)02-0603-06
Authors:WANG Ya-wen  ZHANG Yong  CHEN Xiong-fei  LIU Ying  ZHAO Zhen-yang  YE Ming-guo  XU Yu-xing  LIU Peng-yu
Affiliation:(National Analysis and Testing Center of Nonferrous Metals and Electronic Materials,Beijing 100088,China;China United Test&Certification Co.,Ltd.,Beijing 101400,China;General Research Institute for Nonferrous Metals,Beijing 100088,China;Shandong Dongyi Photoelectric Instruments Co.,Ltd.,Yantai 264670,China;Shandong Technology Transfer Center,CAS,Yantai 264003,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)
Abstract:Based on the self-designed remote laser-induced breakdown spectroscopy (LIBS) system, the focusing characteristics of remote LIBS were analyzed, and the experimental method of quantitative analysis of nickel-base superalloy by remote LIBS was studied. In this LIBS system, the laser focusing and the plasma optical signal acquisition optical paths are coaxial and independently focused. Through automatic focusing, the remote analysis of 1~10 m can be achieved. The results show that affected by the depth of focus, the detectable range of plasma optical signal increases with the increase of working distance. That is, the requirement of the LIBS system for focusing accuracy decreases. At the same time, the decrease of power density caused by the increase of ablation spot size and the decrease of signal acquisition solid angle make the spectral line intensity attenuate in inverse proportion to the fourth power as the working distance increases. In this paper, the standard curves of Ni, Cr, Nb, Mo, Ti and Al in GH4169 nickel-based superalloy were established using the standard curve method without internal standard with internal standard. The goodness of fit of the standard curve with internal standard (0.999 7, 0.999 4, 0.999 87, 0.999 1, 0.998 1 and 0.999 7) was significantly better than that of the standard curve without internal standard (0.953 2, 0.876 6, 0.897 4, 0.914 5, 0.938 4 and 0.991 6). Finally, LIBS and XRF were compared. For major elements Ni, Cr, Nb and Mo, the relative standard deviations of the two methods were 1.75%~3.90% and 0.10%~0.52%, and the relative errors were 0.48%~0.92% and 0.64%~2.25%, respectively; for trace elements Ti and al, the relative standard deviations of the two methods were 5.58%, 5.86% and 2.39%, 5.64%, the relative error is 2.75%, 3.14% and 4.68%, 2.39% respectively. Due to the instability of plasma, the precision of the remote LIBS method is slightly lower than that of the XRF method. However, LIBS method can effectively reduce the measurement error through repeated measurements, which indicates that LIBS technology is feasible for remote on-line analysis of nickel-based superalloys.
Keywords:Laser-induced breakdown spectroscopy  Remote  Depth of focus  Standard curve method
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