Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation: Analysis of the substrate edge chipping and the film delamination |
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Authors: | Eric Felder Sébastien Roy Evelyne Darque-Ceretti |
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Affiliation: | CEMEF, UMR CNRS/MINES ParisTech 7635, BP 207, 06904 Sophia-Antipolis, France |
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