| 激光非接触曲面面形传感器 |
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| 引用本文： | 姜晶,方志良,刘福来,林列,母国光. 激光非接触曲面面形传感器[J]. 光学学报, 1998, 18(11): 503-1507 |
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| 作者姓名： | 姜晶 方志良 刘福来 林列 母国光 |
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| 作者单位： | 南开大学现代光学研究所 |
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| 摘 要： | 提出一种用于空间自由曲面测量的激光非接触曲面面形传感器。该传感器结构简单，在光学原理上传感器的输出量与被测量成线性关系，接收物镜绕系统光轴３６０°接收目标面的漫射光，目标面的倾斜产生的影响很小，解决了困扰空间自由曲面测量中阴影效应、倾斜等问题。该传感器的测量范围为４ｍｍ，分辨率为２μｍ，当目标面（漫反射面和金属等镜面反射面）倾斜角为±８５°时，仍能保证２０μｍ的测量精度。
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| 关 键 词： | 激光 非接触 传感器 面形传感器 位移测量 |
| 收稿时间： | 1997-08-03 |
A Laser Non Contact Surface Sensor for Measuring 3D Free Form Surfaces |
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| Jiang Jing Fang Zhiliang Liu Fulai Lin Lie Mu Guoguang. A Laser Non Contact Surface Sensor for Measuring 3D Free Form Surfaces[J]. Acta Optica Sinica, 1998, 18(11): 503-1507 |
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| Authors: | Jiang Jing Fang Zhiliang Liu Fulai Lin Lie Mu Guoguang |
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| Abstract: | A laser non contact surface sensor for measuring 3D free form surface is proposed. This sensor is simple in structure and its output is linearly proportional to the measured displacement in optical principle. Because this sensor can receive the diffused light of the object in 360° direction, the inclination effect is very small. Problems of shadow effect and inclination influence are solved. The measurement range of the sensor is 4 mm, resolution is 2 μm. When object is inclined to ±85°, measurement error is about 20 μm. |
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| Keywords: | laser non contact sensor surface sensor displacement measurement free form surface. |
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