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Characterization of the high—voltage pulsed discharge plasma of ammonia by emission spectroscopy
引用本文:杨炜东,王培南,刘征平,糜岚,李富铭.Characterization of the high—voltage pulsed discharge plasma of ammonia by emission spectroscopy[J].中国物理 B,2002,11(3):260-265.
作者姓名:杨炜东  王培南  刘征平  糜岚  李富铭
作者单位:State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information, Fudan University, Shanghai 200433, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant Nos 69978005, 29890216 and 10075012).
摘    要:We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia.Ammonia was highly dissociated in the discharge at low pressures.More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa.We discuss the elimination of the oxygen impurity in the ammonia discharge,and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.

关 键 词:等离子体  高压脉冲放电  氨等离子体
收稿时间:5/5/2001 12:00:00 AM
修稿时间:8/7/2001 12:00:00 AM

Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy
Yang Wei-Dong,Wang Pei-Nan,Liu Zheng-Ping,Mi Lan and Li Fu-Ming.Characterization of the high-voltage pulsed discharge plasma of ammonia by emission spectroscopy[J].Chinese Physics B,2002,11(3):260-265.
Authors:Yang Wei-Dong  Wang Pei-Nan  Liu Zheng-Ping  Mi Lan and Li Fu-Ming
Institution:State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, School of Information, Fudan University, Shanghai 200433, China
Abstract:We have used optical emission spectroscopy to characterize the high-voltage pulsed discharge of ammonia. Ammonia was highly dissociated in the discharge at low pressures. More atomic nitrogen was generated as compared to the discharge of nitrogen gas at the same pressure of 0.8kPa. We discuss the elimination of the oxygen impurity in the ammonia discharge, and we estimate the time-dependent atomic excitation temperature and the electron density from the measured spectra.
Keywords:photoemission spectroscopy  plasma  electric discharge
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