Controlled growth of nanocrystalline silicon on permalloy micro-patterns |
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Authors: | J Kočka T Mates M Ledinský J Stuchlík A Fejfar K Gunnarsson |
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Institution: | (1) Institute of Physics of the ASCR, Cukrovarnická 10, 16253 Prague 6, Czech Republic;(2) Department of Engineering Sciences, Uppsala University, Box 534, Uppsala, 75121, Sweden |
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Abstract: | Lithographically prepared micrometer-sized permalloy ellipses were used to control the growth of nanocrystalline Si in otherwise
amorphous Si film prepared by plasma enhanced chemical vapor deposition. Atomic force microscopy and micro-Raman spectroscopy
were employed to study the surface structures before and after the deposition of the Si film. The possible applications of
the controlled growth of nanocrystalline Si micro-patterns are discussed as well as the mechanisms leading to the growth of
these patterns.
PACS 68.55.Ac; 81.15.Gh |
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Keywords: | |
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