Investigation of the electrophysical properties and structures of impurity-defective complexes in silicon doped with palladium

Electric and structural methods are used to investigate formation of impurity-defective complexes in silicon doped with palladium. It is demonstrated that acceptor levels E _C – 0.18 and E _v + 0.34 eV detected in silicon during incorporation of palladium are caused by singly and doubly negatively charged states of [Pd–V] complexes, and the donor level E _v + 0.32 eV is a product of chemical compound of palladium with hydrogen forming the [Pd–H] complex. It is assumed that the palladium impurity in the doped silicon samples causes the elastic crystal energy to change and impurity clouds to be formed around microdefects. An increase in the temperature of palladium diffusion in silicon causes the impurity clouds to decay and the microdefect core sizes to decrease with their subsequent chaining into a needle.