| 磁控溅射制备ZnO薄膜及其声表面波特性 |
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| 引用本文： | 杨光,Santos Paulo V..磁控溅射制备ZnO薄膜及其声表面波特性[J].物理学报,2007,56(6):3515-3520. |
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| 作者姓名： | 杨光 Santos Paulo V. |
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| 作者单位： | (1)Paul-Drude固体电子学研究所，柏林 D-10117，德国; (2)华中科技大学武汉光电国家实验室激光科学与技术研究部，武汉 430074;华中科技大学光电子科学与工程学院，武汉 430074;Paul-Drude固体电子学研究所，柏林 D-10117，德国 |
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| 摘 要： | 通过射频磁控溅射技术在GaAs，Au/GaAs，Si和玻璃基片上成功制备了ZnO多晶薄膜，利用X射线衍射对ZnO薄膜的取向、结晶性进行了表征，结果表明ZnO薄膜呈完全c轴取向，Au缓冲层可以有效地改善ZnO薄膜的晶体质量，X射线摇摆曲线结果表明ZnO(002)衍射峰的半高宽仅为2.41°，同时发现Au缓冲层的结晶质量对ZnO薄膜的c轴取向度有很大影响，通过扫描电子显微镜对ZnO/GaAs和ZnO/Au/GaAs薄膜的表面形貌进行了观测，利用网络分析仪对IDT/ZnO/GaAs薄膜的声表面波特性进行了测量.
关键词：
ZnO薄膜
X射线衍射
声表面波
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| 关 键 词： | ZnO薄膜 X射线衍射 声表面波 |
| 文章编号： | 1000-3290/2007/56(06)/3515-06 |
| 收稿时间： | 2006-11-03 |
| 修稿时间： | 2006-11-03 |
Surface acoustic wave properties of ZnO films grown by magnetron sputtering |
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| Yang Guang,Santos Paulo V..Surface acoustic wave properties of ZnO films grown by magnetron sputtering[J].Acta Physica Sinica,2007,56(6):3515-3520. |
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| Authors: | Yang Guang Santos Paulo V |
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| Institution: | 1. Division of Laser Science and Technology, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China; 2. School of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China ; 3. Paul-DrudelnstituteforSolid-StateElectronics ,Berlin D- 10117, Germany |
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| Abstract: | In this letter we report the fabrication and structural properties of ZnO thin films grown on GaAs，Au/GaAs，Si and glass substrates by rf magnetron sputtering. The x-ray diffraction data indicated that all the ZnO films were pure c-axis oriented and the rocking curves showed that the full-width at half maximum(FWHM) of ZnO(002) peak of ZnO/Au/GaAs films is as small as 2.41°. The SEM images showed better surface for the ZnO films grown with Au buffer. The surface acoustic wave properties of IDT/ZnO/GaAs filter were measured by HP8753C network analyzer. The results indicated that the insertion loss is only 10.4dB and the electric efficiency can be up to 84.1% using the 5.6μm-wavelength IDT. |
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| Keywords: | ZnO films x-ray diffraction surface acoustic waves |
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