| 记录薄膜Te—In—Sb光学性质的研究 |
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| 引用本文： | 王豪 干福熹. 记录薄膜Te—In—Sb光学性质的研究[J]. 光学学报, 1989, 9(6): 62-567 |
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| 作者姓名： | 王豪 干福熹 |
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| 作者单位： | 中国科学院上海光学精密机械研究所(王豪)，中国科学院上海光学精密机械研究所(干福熹) |
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| 摘 要： | 采用高频溅射方法制成Te-In-Sb系统的非晶态薄膜.系统的研究了不同组分薄膜的透射、反射谱,及其在结晶过程中的变化.用透射电镜研究了Te-In-Sb薄膜的结构和晶化过程.分析了组分对薄膜的吸收系数、介电常数、光学能隙等光学性质的影响.并由此综合评价了Te-In—Sb系统中比较适合作为光盘介质的组成.
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| 关 键 词： | 薄膜 光学性质 碲 铟 锑 |
| 收稿时间： | 1988-07-06 |
The optical properties of Te-In-Sb recording thin film |
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| WANG HAO AND GAN FUXI. The optical properties of Te-In-Sb recording thin film[J]. Acta Optica Sinica, 1989, 9(6): 62-567 |
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| Authors: | WANG HAO AND GAN FUXI |
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| Abstract: | The amorphous Te-In-Sb thin films were prepared by radio frequency sputtering. We investigated the reflectance and the transmittance of different compositions of Te-In-Sb films. The structure and its change were observed by TEM and electron diffraction. The effect of the Te-In-Sb composition on their optical properties, such as dielectric constant, absorbation coefficient and optical gap etc. are discussed. As a result, we find that TeselnaiSbsr .film may be a suitable medium for erasable optical disk. |
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| Keywords: | opties thin film optical storage. |
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