Structure of Ba0.7Sr0.3TiO3 films grown by chemical solution deposition on polycor substrates |
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Authors: | O. M. Zhigalina K. A. Vorotilov D. N. Khmelenin A. S. Sigov |
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Affiliation: | (1) Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia;(2) State Institute of Radio Engineering, Electronics, and Automatics, pr. Vernadskogo 78, Moscow, 117454, Russia |
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Abstract: | The structure of barium strontium titanate (BST) films grown by chemical solution deposition on polycor substrates was studied by transmission electron microscopy, high-resolution microscopy, and x-ray diffraction analysis. It was found that a grain structure inhomogeneous in cross section is formed after two-step crystallization at T = 700 and 950°C. There are equiaxed grains (44.2 nm in average size) in the BST-polycor interfacial region and a multilevel columnar structure (grain height up to 150 nm) with {100} texture in the film bulk. Grain growth inhibition during high-temperature annealing and underlayer formation in the interfacial region are caused by a change in the substrate structure, i.e., grain reorientation and {112} texture formation. |
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