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Chemical Vapor Deposition of Phase‐Pure Uranium Dioxide Thin Films from Uranium(IV) Amidate Precursors |
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| Authors: | Mark D. Straub Jennifer Leduc Michael Frank Aida Raauf Trevor D. Lohrey Stefan G. Minasian Sanjay Mathur John Arnold |
| Abstract: | Homoleptic uranium(IV) amidate complexes have been synthesized and applied as single‐source molecular precursors for the chemical vapor deposition of UO2 thin films. These precursors decompose by alkene elimination to give highly crystalline phase‐pure UO2 films with an unusual branched heterostructure. |
| Keywords: | Actinoide Anorganische Materialien Chemische Gasphasenabscheidung Dü nnschichten Uran |