| 硅微板条谐振式传感器谐振频率分析及计算 |
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| 引用本文： | 李志能,陆献尧,裴念.硅微板条谐振式传感器谐振频率分析及计算[J].真空电子技术,1994(6). |
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| 作者姓名： | 李志能 陆献尧 裴念 |
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| 作者单位： | 浙江大学信电系 |
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| 摘 要： | 对硅微机械谐振式传感器的谐振频率计算提出了新的物理模型—两端固支薄板条模型，该模型不同于常说的硅桥（梁）或硅弦模型。计算结果表明该模型更符合实际，优于有关文献结果。
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| 关 键 词： | 硅桥，薄板条模型，传感器，谐振频率 |
Analysis of the Resonant Frequency for The Micro-mechanical Silicon Sensors |
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| Li Zhineng, Lu Xianyao, Pei Nian.Analysis of the Resonant Frequency for The Micro-mechanical Silicon Sensors[J].Vacuum Electronics,1994(6). |
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| Authors: | Li Zhineng Lu Xianyao Pei Nian |
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| Abstract: | The thin plate model, which differentiates from "beam" and "string" model, for the calculation of the resonant frequency of the micro-machanical silicon bridge sensors is presented in this paper. The calculated values are more agreed with experimental results than some of publications. |
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| Keywords: | Silicon beam Thin plate model Sensor Resonant frequency |
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