Spetroscopic ellipsometry study on electrical and elemental properties of Sb-doped ZnO thin films

Room-temperature spectroscopic ellipsometry data has been analyzed to determine the complex dielectric functions, ɛ(E) = ɛ₁(E) + iɛ₂(E) of as-deposited Sb-doped ZnO (SZO) thin films grown on n-Si(100) substrates by dual ion beam sputtering deposition system for different growth temperatures (T_g). The dielectric functions have been obtained from ellipsometry data analyses using Cody-Lorentz oscillator in the GenOsc model. A gradual reduction in the value of electron concentration and finally the conversion of doping characteristics from donor type to acceptor type was observed with the rise in T_g. This, in turn, resulted in the decline of broadening of ɛ₁ peaks, and hence in the increase of excitonic lifetime. Optical band-gap energy was observed to decrease with increase in T_g from 200 to 300 °C, and then rise continuously with further increase in T_g. X-ray diffraction measurements showed that all SZO films had (002) preferred crystal orientation. Hall measurement and X-ray photoelectron spectroscopy analysis confirmed that the change in the electrical conduction from n-to p-type was due to the enhancement in the value of Sb⁵⁺/Sb³⁺ ratio and Sb_Zn–2V_Zn complex formation in SZO films.