激光干涉任意转角测量的信号线性化处理方法

激光干涉测角技术由于受到测量原理非线性的限制，大多只能用于小角度的测量。为了增大测角范围，提出了一种将测量原理进行线性化处理的方法，以实现任意转角的干涉测量。采用空间上互相垂直放置的2套干涉系统分别获得两路正交信号，将所得到的正弦信号和余弦信号的差值作为输出信号，这样处理后输出信号和被测转角之间基本上呈线性关系。对这种方法进行了理论分析及实验验证。实验结果表明．处理后信号的线性得到了大大的提高，非线性误差减小到信号处理前的1／20。

Signal Processing Method to Improve the Linearity of Random Rotating Angle Measurement by Laser Interference

Because of the non-linear character of the measurement principle,most angle measurement methods based on laser interference techology were used only for the measurement of small angles.In order to enlarge the angle measurement range,a new method which can linearize the principle and realize random angle measurement by interference was proposed here.Two interference systems perpendicular to each other were used to generate two orthogonal signals.The difference between the generaed sine and cosine signals was made as the output and the relation between the measured angle and the output signal is thus approximately linear.Theoretical analysis and experimental verification were made in this paper.Experimental results show that the linearity of the signal is greatly improved and the non-linearity deviation is reduced to one-twentieth.