Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases |
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| Authors: | Yu-Yun Chen Liang-Yu Yen Jin-Cherng Hsu Huang-Lu Chen Paul W. Wang Hsiang-Lin Liu |
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| Affiliation: | (1) Department of Thin Film Technology, Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany;(2) Department of Thin Film Technology, Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany |
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| Abstract: | Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used. |
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