Growth of nano-crystalline diamond on single-crystalline diamond by CVD method |
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| Authors: | E E Ashkinazi V S Sedov R A Khmelnitsky A A Khomich A V Khomich |
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| Institution: | 1.Prokhorov General Physics Institute,Russian Academy of Sciences,Moscow,Russia;2.National Research Nuclear University “MEPhI”,Moscow,Russia;3.Lebedev Physical Institute,Russian Academy of Sciences,Moscow,Russia;4.Kotel’nikov Institute of Radio Engineering and Electronics,Russian Academy of Sciences,Fryazino, Moscow oblast,Russia;5.Troitsk Institute for Innovation and Fusion Research (GNTs RF TRINITI),Troitsk, Moscow oblast,Russia;6.Harbin Institute of Technology,Shenzhen, Harbin,P. R. China |
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| Abstract: | Nanocrystalline (NC) diamond films are grown by chemical vapor deposition on various single crystal diamond faces. Under conditions of NC diamond growth, the growing filmmorphology is reduced to two planes: {100} and {111}. The {100} planes are smooth and homoepitaxial layerby-layer growth occurs on them, whereas the NC film formed by twin crystalliteswith sizes of several tens and hundreds nanometers grows on {111} planes. Nitrogen impurity sharply increases the diamond growth rate. |
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