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非晶硅中的缺陷态光吸收谱
引用本文:韩大星,肖扬.非晶硅中的缺陷态光吸收谱[J].固体电子学研究与进展,1989,9(4):396-398.
作者姓名:韩大星  肖扬
作者单位:中国科学院物理研究所 (韩大星,肖扬,吴雷),中国科学院物理研究所(钱生法)
摘    要:<正> 非晶硅薄膜的光学及电学性质与共电子局域态分布紧密相关。为了改进非晶硅薄膜器件的性质,如太阳能电池、薄膜晶体管等,需要低局域态密度的材料,因而测量并了解局域态的性质十分重要。局域态包括带尾态、缺陷态及亚稳缺陷态。本文着重讨论缺陷态及亚稳缺陷态。

关 键 词:非晶硅  缺陷态  光谱  测量  簿膜

Defect Optical Absorption in a-Si:H
Abstract:An extra band of change in optical absorption was observed by means of Infrared Stimulated Current method (IRSC) for either native or light- induced metastable defects in a-Si:H.Both the spectral distribution of the extra absorption and the relaxation of the light-induced metastable states are different from those of native defects. The photo-induced absorption spectra △α/α of a-Si:H samples can be obtained by measuring the primary and the second harmonic of Photothermal Deflection Spectroscopy(PDS) signal. From the △α/α we can indicate the defect state energy levels, thus studying the new gap states caused by doping.
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