| Abstract: | We report the fabrication and performance of a silicon‐on‐glass micro gas chromatography eight‐capillary column based on microelectromechanical systems technology that is 50 cm long, 30 μm wide, and 300 μm deep. According to the theory of a gas chromatography column, an even gas flow among different capillaries play a vital role in the peak broadening. Thus, a flow splitter structure is designed by the finite element method through the comparison of the velocity distributions of the eight‐capillary columns with and without splitter as well as an open tubular column. The simulation results reveal that eight‐capillary column with flow splitters can receive more uniform flow velocity in different capillaries, hence decreases the peak broadening and in turn increases the separation efficiency. The separation experiment results show that the separation efficiency of about 22 000 plates/m is achieved with the chip column temperature programmed for analysis of odorous sulfur pollutants. This figure is nearly two times higher than that of the commercial capillary column coated the similar stationary phase. And the separation time of all the components in the microcolumn is less than 3.8 min, which is faster than the commercial capillary column. |
