Affiliation: | 1.Prokhorov General Physics Institute, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russia ;2.National Research Nuclear University “MEPhI”, Kashirskoe sh. 31, Moscow, 115409, Russia ;3.National Research University of Electronic Technology (MIET), 4806 proezd 5, Zelenograd, Moscow, 124498, Russia ;4.Moscow Institute of Physics and Technology, Institutskii per. 9, Dolgoprudnyi, Moscow Oblast, 141700, Russia ;5.Russian Quantum Center, ul. Novaya 100A, Skolkovo, Moscow oblast, 143025, Russia ; |