High-resolution differential interference contrast X-ray zone plates: Design and fabrication

Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1 nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography.