Measurement of shock waves velocity in the air plasma of capacitively coupled RF discharge |
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| Authors: | AE Dubinov SA Sadovoy VD Selemir |
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| Institution: | (1) Moscow Engineer Physical Institute, Branch No. 4, Sarov (Arzamas-16), Russia, RU;(2) Russian Federal Nuclear Center - All-Russia Scientific Research Institute of Experimental Physics, Sarov (Arzamas-16), Russia, RU |
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| Abstract: | The velocity of shock wave propagation in the air plasma of stationary capacitively coupled RF discharge at different gas
pressure and charged particles concentration has been measured. It is shown, that the velocity of the shock wave increases
at the increase of the concentration. Measurement results are brought to the universal dependence.
Received 17 August 1998 / Accepted 10 December 1999 |
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| Keywords: | : Shock wave Capacitively coupled RF discharge Charged particle concentration |
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