| 飞秒激光精密微纳加工的研究进展 |
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| 引用本文： | 朱江峰,魏志义.飞秒激光精密微纳加工的研究进展[J].物理,2006,35(8):679-683. |
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| 作者姓名： | 朱江峰 魏志义 |
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| 作者单位： | 中国科学院物理研究所,中国科学院光物理重点实验室,北京,100080 |
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| 基金项目： | 国家自然科学基金;中国科学院知识创新工程项目 |
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| 摘 要： | 飞秒激光由于其超快时间特性和超高峰值功率特性在精密微纳加工领域引起了人们广泛的重视．在与物质的相互作用中它能快速、准确地将能量作用在特定的区域内，从而可以获得极高的分辨率和加工精度。文章综述了飞秒激光精密微纳加工的最新研究进展，分别就飞秒激光烧蚀微加工和飞秒激光双光子聚合产生三维微纳结构进行了介绍，阐述了各自的物理机制．最后对飞秒激光微纳加工的研究前景做了初步探讨。
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| 关 键 词： | 飞秒激光 微纳加工 烧蚀 双光子聚合 |
| 收稿时间： | 2005-12-16 |
| 修稿时间： | 2005-12-162006-02-02 |
Femtosecond laser micro-nano fabrication |
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| ZHU Jiang-Feng,WEI Zhi-Yi.Femtosecond laser micro-nano fabrication[J].Physics,2006,35(8):679-683. |
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| Authors: | ZHU Jiang-Feng WEI Zhi-Yi |
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| Institution: | Key Laboratory of Optical Physics,Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China |
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| Abstract: | Great interest is focused on femtosecond laser micro - nano fabrication due to the ultra - short time scale and ultra - high peak power density characteristics of the femtosecond lasers. Very high resolution and accuracy can be achieved when working with rigid materials and liquid resin. In this paper We introduce the progress of femtosecond laser precise micro - nano fabrication. Two different fabrication mechanisms are described including laser ablation and two photopolymerization. Finally, the prospect of femtosecond laser fabrication is discussed. |
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| Keywords: | femtosecond laser micro-nano fabrication ablation two photopolymerization |
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