Modeling and simulation of a novel vertical actuator based on electrowetting on dielectric |
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Authors: | Ping An Jing Chen Yilong Hao |
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Institution: | National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, 100871 Beijing, China |
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Abstract: | A novel vertical actuator based on electrowetting on dielectric (EWOD) was designed, analyzed and simulated. Modeling results
indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified
by Covent_ware 2006. As a result, the vertical driving force of the EWOD actuator with a 1.1nL droplet and a 1.75 μm thick
polymer was about 0.5 μN under an applied voltage 100V which was comparable to that of the electrostatic actuators. Moreover,
the noise from plane forces we analyzed and simulated was very low. Therefore, we made a conclusion that the EWOD actuator
can be used in MEMS transducer. |
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Keywords: | Wetting EWOD Driving force Actuator |
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