Optimization of large area pulsed laser deposition of YBaCuO thin films by SNMS depth profiling and rutherford backscattering |
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Authors: | H Börner H Hochmuth T Schurig Z Quan and M Lorenz |
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Institution: | (1) Institut für Experimentalphysik II, Universität Leipzig, Linnéstrasse 5, D-04103 Leipzig, Germany;(2) Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12, D-10587 Berlin, Germany |
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Abstract: | The scaling up of established deposition techniques like pulsed laser deposition (PLD) to larger substrate diameter is a main condition for the technological application of high-Tc superconducting (HTSC) thin films. SNMS depth profiling and RBS have been used to control the homogeneity of film thickness and stoichiometry of Au/YBaCuO/CeO2 thin film systems deposited on 3-inch sapphire wafers by PLD. A systematic dependence has been found for the relative SNMS sensitivity factors (RSF) on the structural state of YBaCuO. Therefore, a calculation of the composition of the epitaxial YBaCuO thin films is not possible using RSF determined from polycrystalline YBaCuO target material. The interdiffusion of thin films and substrate has been investigated in dependence on the deposition temperature by SNMS depth profiling. The obtained homogeneity of film thickness and stoichiometry over the entire 3-inch diameter proofs the suitability of PLD for in-situ deposition of 3-inch wafers by YBaCuO thin film systems for microwave applications. |
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