RF Plasma Deposition of PEO-Like Films: Diagnostics and Process Control

Organic thin films deposited by means of radio-frequency glow discharges fed with Triglyme vapors have been investigated to explore the feasibility for deposition of organic thin films with polyethylene oxide-like features. The film chemical composition has been analyzed by means of X-ray Photoelectron Spectroscopy and FT Infrared Absorption Spectroscopy. Plasma phase diagnostics has been accomplished by means of Optical Emission Spectroscopy. It is shown that the surface density of ether carbon, which is considered the marker of the content of ethylene oxide units in the coating, decreases as the power input is increased. It is also shown that the retention of monomer structure in the film can be easily controlled in situ by actinometric optical emission spectroscopy.