| 用传统光学薄膜技术改进菲涅耳波带板 |
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| 引用本文： | 朱精敏,尹行.用传统光学薄膜技术改进菲涅耳波带板[J].浙江大学学报(理学版),1998,25(1):28-30. |
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| 作者姓名： | 朱精敏 尹行 |
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| 作者单位： | 杭州大学物理系，德清职业高中 |
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| 摘 要： | 利用二元光学理论改进菲涅耳波带板, 能大幅度提高衍射效率.本文介绍利用传统的照相复制和真空镀膜技术制作位相型菲涅耳波带板的方法, 指出了膜料选择和膜厚控制的依据, 实测了位相台阶数为2时的衍射效率, 为通常菲涅耳波带板的近4 倍.
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| 关 键 词： | :菲涅耳波带板 光刻 真空蒸发 衍射效率 |
Improving the Fresnel Zone Plate with the Traditional Technique of Optical Thin Film |
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| Zhu Jingmin,He Weiqiang,Zhao Huandong.Improving the Fresnel Zone Plate with the Traditional Technique of Optical Thin Film[J].Journal of Zhejiang University(Sciences Edition),1998,25(1):28-30. |
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| Authors: | Zhu Jingmin He Weiqiang Zhao Huandong |
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| Institution: | Zhu Jingmin He Weiqiang Zhao Huandong
(Physics Depar tment of Hangzhou University , Hangzhou 310028)
Yin Hang
(Deqing Professio n High School, Deqing 313200) |
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| Abstract: | Using the theory of binary optics to improve the Fresnel zone plate, one can raise its diffraction efficiency greatly. This paper introduces the manufacture method of phase type Fresnel zone plate using the traditional technique of photogravure and vacuum vaporization coating. The bases for the choosing of film material and for the controling of the film thickness are pointed out. The diffraction efficiency for that the phase step number is 2 was measured, that is equal to about 4 times of usual Fresnel zone plate. |
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| Keywords: | Fresnel zone plate photogravure vacuum vaporization diffraction efficiency |
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