1. Laboratorium für Angewandte Physik, Gerhard-Mercator-Universit?t Duisburg, D-47048, Duisburg, Germany 2. Forschungszentrum Rossendorf e.V., Institut für Ionenstrahlphysik und Materialforschung, D-01314, Dresden, Germany
Abstract:
Si+ ions of 50 keV in energy were implanted into α-Fe (95% 57Fe) with a nominal dose of 5 × 1017 cm?2 at 350°C. The depth distribution of the Fe-Si phases formed by ion implantation after annealing at 300 and 400°C for 1 h was studied quantitatively by depth-selective conversion-electron Mössbauer spectroscopy (DCEMS). Ordered Fe3Si and ε-FeSi was observed.