单晶硅表面改性及其微观摩擦学性能研究进展

评述了单晶硅表面改性及其微观摩擦磨损性能研究现状和进展,就单晶硅微观机械性能和摩擦磨损性能、单晶硅表面沉积薄膜和氧化层的微观机械和摩擦学性能及硅材料表面离子注入和表面纳米化等相关研究进行了归纳总结;指出应当继续深化硅材料表面改性技术及改性层微观摩擦学性能的研究,特别是应当加强硅材料表面离子注入及表面纳米化的研究,从而满足MEMs／NEMs等高技术领域的应用和发展需要．

Research Progress in Surface Modification and Micro-Tribological Behavior of Single-Crystal Silicon

A review was given on the research progress in the surface modification and micro-tribological behavior of single crystal silicon. Thus the studies on the micro-mechanical and tribological properties of single crystal Si and the deposited films and oxide layers thereon, and that on the ion implantation and surface nanocrystallization of the single crystal Si were summarized and discussed. It was suggested to further the study on the surface modification techniques and the micro-nano-tribological behaviors of the modified layers, in particular, to promote the study on the ion implantation and surface nanocrystallization of the Si-based materials, so as to meet the need in the application and development of the high-tech areas such as MEMS and NEMS.