| 氮化铝薄膜的红外吸收光谱和喇曼光谱的研究 |
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| 引用本文： | 刘付德,梁子南.氮化铝薄膜的红外吸收光谱和喇曼光谱的研究[J].光学学报,1989,9(8):52-757. |
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| 作者姓名： | 刘付德 梁子南 |
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| 作者单位： | 西安交通大学，电子科技大学无线电技术系 成都 |
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| 摘 要： | 本文报道用直流平面磁控溅射法在Si片上生长c轴高度择优取向AIN薄膜的光学特性.俄歇谱分析表明薄膜是高纯的.从红外吸收光谱上分析获得晶格振动纵、横模的频率分别为2.5×10~(13)HZ和1.8×10~(13)Hz.从喇曼光谱上分析获得AIN薄膜的光学声子频率为297、512、607、656、832cm~(-1).与几种已知的纤锌矿结构二元化合物的声子频率模式类比获得AIN的光学声子模式.进一步分析表明AIN是一种静电力大于原子间各向异性力的晶体,且声子的最高频率与r~(-3/2)N~(-1/2)成正比.
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| 关 键 词： | 氮化铝 薄膜 吸收光谱 喇曼光谱 |
| 收稿时间： | 1988/9/19 |
The investigation of infrared absorption spectrum and Raman spectrum of AlN thin films |
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| LIU FUDE.The investigation of infrared absorption spectrum and Raman spectrum of AlN thin films[J].Acta Optica Sinica,1989,9(8):52-757. |
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| Authors: | LIU FUDE |
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| Institution: | LIU FUDE (Xian Jiaotong University)
LIANG ZINAN (University of Electronic Scienca and Technology of China) |
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| Abstract: | c-axig highly oriented crystallite films of AIN have been prepared on Si substrates by d. c. planar magnetron sputtering. The analysis for the infrared absorption spectrum indicated the frequencies of crygtal lattice longitudinal and transverse vibration modes being ag 2.5×1013Hz and 1.8×1013Hz. The optical phonons at 297, 512, 607, 656, 832cm-1 have been observed in Eaman spectrum of AIN thin filmg. The modes of these phonong were determined by comparision with those of the given binary compounds crysbalized wurtzite structure. Further analysis shows that A1N is a crystal with which interaction forces were mostly electrostatic in original and the highest frequency of the phonona was direobly proportional to r-3/2M-1/2. |
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| Keywords: | AIN thin film infrared absorption spectrum Raman spectrum |
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